IHP

Gettering and Defect Engineering
in Semiconductor Technology
Program
Sunday 22.09.
Monday 23.09. Tuesday 24.09. Wednesday 25.09. Thursday 26.09. Friday 27.09.

Tuesday

September 24

   
Session: Czochralski silicon crystal growth

Chairpersons:

K. Kakimoto and D. Yang

09:00-09:40

Invited: Computer Simulation of Intrinsic Point Defect Distribution Valid for All Pulling Conditions in Large-diameter Czochralski Si Crystal Growth

K. Sueoka, Y. Mukaiyama, S. Maeda, M. Iizuka, V. M. Mamedov

Okayama Prefectural University, 111 Kuboki, Soja, Okayama 719-1197, Japan
STR Japan K.K., Yokohama Business Park, Hodogaya-ku, Yokohama, Kanagawa 240-0005, Japan
Technology, GlobalWafers Japan Co., Ltd., 6-861-5 Higashiko, Seiro, Niigata 957-0197, Japan
STR Group, Inc. - Soft Impact, Ltd., St. Petersburg, Russia

09:40-10:00

Contributed: Novel Way to Assess the Validity of CzochralskiI Growth Simulations

J. Veirman, E.Letty, W. Favre, M. Albaric, M. Lemiti

CEA, LITEN, INES, Le Bourget-du-Lac, France
Université de Lyon, INL, CNRS, France

10:00-10:20

Contributed: Numerical modeling of effect of thermal stress and heavy doping for behavior of intrinsic point defects in large-diameter Si crystal growing by Czochralski method

Y Mukaiyama, M. Iizuka, V. Mamedov, V. Kalaev, A. Smirnov, S. Maeda, K. Sueoka

STR Japan K.K., Yokohama Business Park, Hodogaya-ku, Yokohama, Kanagawa 240-0005, Japan
STR Group, Inc. – Soft-Impact, Ltd., 64 Bolshoi Sampsonievskii pr., Build. "E", Office 605, St. Petersburg, 194044, Russia
GlobalWafers Japan Co., Ltd., 6-861-5 Higashiko, Seiro, Niigata 957-0197, Japan
Okayama Prefectural University, 111 Kuboki, Soja, Okayama 719-1197, Japan

10:20-10:40

Contributed: Experimental and theoretical analysis of the growth ridge geometry of Czochralski-grown silicon crystals

L. Stockmeier, C. Kranert, P. Fischer, B. Epelbaum, C. Reimann, G. Raming, A. Miller

Fraunhofer IISB, Schottkystraße 10, 91058 Erlangen, Germany
Fraunhofer THM, Am St.-Niclas-Schacht 13, 09599 Freiberg, Germany
Siltronic AG, Johannes-Hess-Straße 24, 84489 Burghausen, Germany

10:40-11:10

Coffee break

   
Session: Oxygen precipitation and gettering

Chairpersons:

K. Sueoka and Y. Yakimov

11:10-11:50

Invited: Gettering and diffusion of impurities in heavily boron-doped silicon wafer

K. Torigoe, T. Ono

Technology Division, Advanced Evaluation and Technology Development Department, SUMCO Corporation,1-52 Kubara, Yamashiro-cho, Imari, Saga 849-4256, Japan

11:50-12:10

Contributed: Effects of tin-doping on oxygen precipitation in Czochralski silicon with prior rapid thermal processing

Y. Sun, W. Lan, J. Zhao, T. Zhao, J. Zhao, X. Ma, D. Yang

State Key Laboratory of Silicon Materials and School of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, People’s Republic of China

12:10-12:30

Contributed: Oxygen Precipitation in Nitrogen-Doped Czochralski Silicon Single Crystals with Low Oxygen Concentration

K. Kajiwara, K. Harada, K. Torigoe, M. Hourai

SUMCO Corporation, 2201 Oaza-Kamioda, Kouhoku-cho, Kishima-gun, Saga 849-0597, Japan
SUMCO Corporation 1-51, Kubara, Yamashiro-cho, Imari-shi, Saga 849-4256, Japan

12:30-14:00

Lunch

   
Session: Quantum effects and applications

Chairpersons:

M. Brehm and H. Liu

14:00-14:40

Invited: Investigation of the SiC/SiO2 interface using quantum emitters

B. C. Johnson, J. Woerle, R. A. Parker, C. T. K. Lew, D. Haasmann, S. Dimitrijev, M. Camarda, J. C. McCallum

ARC Centre for Quantum Computing and Communication Technology, School of Physics, University of Melbourne, Victoria 3010, Australia
Paul Scherrer Institut, 5232 Villigen, Switzerland
Advanced Power Semiconductor Laboratory, ETH Zurich, Physikstrasse 3, 8092 Zurich,
Switzerland
Queensland Micro- and Nanotechnology Centre, Griffith University, Queensland, Australia
School of Physics, University of Melbourne, Victoria 3010, Australia

14:40-15:20

Invited: Electron spin resonance of dopants in 2D materials

A. Stesmans

Department of Physics and Astronomy, University of Leuven, Celestijnenlaan 200D, 3001 Leuven, Belgium

15:20-15:40

Contributed: Low-energy implantation of group-IV and group-III-V elements to enhance optical properties of (Si)Ge quantum dots

J. Aberl , L. Spindlberger, J. Freund, T. Fromherz, F. Schäffler, M. Grydlik, M. Brehm

Institute of Semiconductor and Solid State Physics, Johannes Kepler University, Altenberger Straße 69, A-4040 Linz, Austria

15:40-16:10

Coffee break

   
Session: Advanced diagnostics

Chairpersons:

V. Kveder and M. Seibt

16:10-16:50

Invited: Self-Diffusion in Amorphous Semiconductors - Studies with Neutron Reflectometry

F. Strauß, H. Schmidt

Clausthal Centre for Material Technology, Agricolastraße 2, 38678 Clausthal-Zellerfeld, Germany
Institute for Metallurgy, TU Clausthal, Robert-Koch-Str. 42, 38678 Clausthal-Zellerfeld, Germany

16:50-17:10

Contributed: The photo-elastic constants of silicon reviewed in experiment and simulation

M. Herms, G. Irmer, G. Kupka, M. Wagner

PVA Metrology & Plasma Solutions GmbH., Am Nasstal 6/8, D-07751 Jena-Maua, Germany
2TU Bergakademie Freiberg, Institute of Theoretical Physics, D-09596 Freiberg

17:10-17:30

Contributed: Scanning spreading resistance microscopy and numerical simulations for the characterization of electrically active dopants in semiconductors

J. K Prüßing, T. Böckendorf, G. Hamdana, E. Peiner, H. Bracht

Institute of Materials Physics, University of Münster, Wilhelm-Klemm-Straße 10, D-48149 Münster, Germany
Institute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, Hans-Sommer-Straße 66, D-38106 Braunschweig, Germany

17:30-17:50

Contributed: High-resolution scanning transmission EBIC: advances and limits of spatial resolution

T.Meyer, P.Peretzki, M.Seibt

University of Goettingen, 4. Physical Institute – Solids and Nanostrcutrures and CRC 1073, Friedrich-Hund-Platz 1, 37077 Göttingen, Germany

17:50-18:10

Contributed: Evolution of the properties of helium nanobubbles in silicon during in situ annealing probed by spectrum imaging in the transmission electron microscope

M.-L. David, J. Dérès, K. Alix, C. Hébert, L. Pizzagalli

Institut Pprime, CNRS-Université de Poitiers, Bd M.&P. Curie, BP 30179, 86962 Futuroscope-Chasseneuil cedex
CIME, EPFL-SB-CIME-GE, CH-1015 Lausanne, Switzerland

18:10-19:30

Dinner


Tuesday

September 24

 

Postersession I

19:30-21:30

Defect induced unusual magnetism in semiconducting molybdenum dichalcogenides

A. Shengelaya, Z. Guguchia, A. Kerelsky, D. Edelberg, S. Banerjee, F. von Rohr, D. Scullion, M. Augustin, M. Scully, D. A. Rhodes, Z. Shermadini, H. Luetkens, C. Baines, E. Morenzoni, A. Amato, J. C. Hone, R. Khasanov, S. J. L. Billinge, E. Santos, A. N. Pasupathy, Y. J. Uemura

19:30-21:30

Dramatic changes of spin-dependent probability of annihilation of electron-positron pairs in bismuth impurity centers of different symmetry in floating-zone n–type natural silicon

N. Arutyunov, M. Elsayed, R. Krause-Rehberg, V. Emtsev, N. Abrosimov, G. Oganesyan, V. Kozlovskii

19:30-21:30

Decomposition of the solid solution of interstitial magnesium in silicon

Yu.A. Astrov, V.B. Shuman, L.М. Portsel, А.N. Lodygin, S.G. Pavlov, N.V. Abrosimov, H.-W. Hübers

19:30-21:30

Deep levels due to nickel reactions with vacancy-type defects in silicon

N. Yarykin, S. Lastovskii, J. Weber

19:30-21:30

Peculiarity of electric properties of oxygen implanted silicon at early precipitation stages

D.V. Danilov , O.F. Vyvenko and N.A. Sobolev

19:30-21:30

Room-temperature Ni interaction with deformation-induced defects in Si: A DLTS study

O.A. Soltanovich, N.A. Yarykin and E.B. Yakimov

19:30-21:30

Annealing behaviour of oxygen-related centres in oxygen-lean silicon

A. A. Grigorev, H. M. Ayedh, A. Galeckas, E. V. Monakhov

19:30-21:30

Rapid thermal processing based internal gettering for Czochralski silicon wafers: Effect of high temperature pre-anneal

J. Wang , L. Jiang, W. Lan, X. Sun, T. Zhao, D. Yang , X. Ma

19:30-21:30

In situ synchrotron X-ray imaging of silicon crystal growth – Correlation with electrical properties

H. Ouaddah, I. Périchaud, O. Palais, M. Di Sabatino, G. Reinhart, G. Regula, N. Mangelinck-Noël

19:30-21:30

Photoluminescence and phase transition of fullerene films on porous silicon

N. Mamedov, T. Dzhafarov, A. Bayramov, S. Asadullayeva, E. Alizade, M. Sadigov, S. Ragimov

19:30-21:30

Diffusion characteristics of the oxygen dimer and VO2 defect in silicon

L. I. Murin, E. A. Tolkacheva, V. P. Markevich, and A. R. Peaker

19:30-21:30

Gettering mechanism of copper in n-type silicon wafers

R. Ozaki, K. Torigoe, T. Mizuno, K. Yamamoto

19:30-21:30

Formation and diffusion of intrinsic point defects in bulk and monolayer MoS2: first principles study

V. Gusakov, J. Gusakova, B. K. Tay

19:30-21:30

Effect of aluminum gettering and thermal treatments on light-emitting properties of dislocation structures in self-implanted silicon subjected to boron ion doping

A. Tereshchenko, D. Korolev, M. Khorosheva, A. Mikhaylov, A. Belov, A. Nikolskaya, D. Tetelbaum

19:30-21:30

Iodine-ethanol surface passivation for measurements of millisecond carrier lifetimes in silicon

M. Al-Amin, N. E. Grant, J. D. Murphy

19:30-21:30

Deep levels in sulfur hyperdoped silicon probed by Deep Level Transient Spectroscopy

A. Ahrens, B. Jürgens, A. L. Baumann, S. Kontermann, W.Schade, M.Seibt

19:30-21:30

Silicon-Aluminum alloying at grain boundaries in multicrystalline silicon studied by ex-situ and in-situ electron microscopy techniques

C. Flathmann, H.Spende, T. Meyer, P.Peretzki, M.Seibt

19:30-21:30

Electrically detected magnetic resonance study of intrinsic defects in SiC pn junction devices

C. T.-K. Lew, R. A. Parker, D. L. Creedon, J. C. McCallum, and B. C. Johnson

19:30-21:30

High efficiency silicon based photomodulators for mm and THz wave radiation

N. Grant, I. Hooper, L. Barr, S. Hornett, and J. Murphy

19:30-21:30

A Laplace DLTS study of thermal donors in silicon

K. Gwozdz, V. Kolkovsky, J. Weber

19:30-21:30

Diffusion of phosphorus and boron from ALD oxides into silicon

S. Beljakowa, P. Pichler, B. Kalkofen, R. Hübner

19:30-21:30

Radiation defects created in n-type 4H-SiC by electron irradiation in the energy range of 1 to 10 MeV

P. Hazdra, J. Vobecký

19:30-21:30

Lifetime control in irradiated and annealed Cz n-Si: role of divacancy-oxygen defects

M. Kras’ko, A. Kolosiuk, V. Voitovych, V. Povarchuk